Air bearing stage
Air Stage LBT Series
Air Stage LBT Series Compatible with Class 1 clean rooms Stroke range from 50 mm to 500 mm Encoders can be selected from 1 µm to 0.05 µm depending on the application Straightness and flatness are 0.5 µm/300 mm Pitching and yawing are ±2 arc seconds Delivery is possible in a fully assembled state from a condition without coils, magnets, or encoders There is a wealth of overseas delivery records for semiconductor inspection equipment, and this is the first introduction in Japan. Standardization enables low costs and short delivery times. There is also a lineup of XY stages.
- Company：TOYO ROBOTICS
- Price：100,000 yen-500,000 yen
